本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。
It is Introduced the principle and method of vacuum leak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.
介绍了行星螺杆挤出机设计、制造中一些重要技术参数的确定以及实践中一些有益尝试。
The determination of some key technical parameters in the design and manufacturing of the planetary screw extruder is presented and the practice of it is introduced.
介绍了行星螺杆挤出机设计、制造中一些重要技术参数的确定以及实践中一些有益尝试。
The determination of some key technical parameters in the design and manufacturing of the planetary screw extruder is presented and the practice of it is introduced.
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