结果：分析检查得出的数据和由交换代替法可见结果，清楚问题主要发生在真空泵供电装置上。
Results: See data pass measure and result by exchange ion pump's connect to ion pump PSU. Main question at ion pump PSU.
结果：分析检查得出的数据和由交换代替法可见结果，清楚问题主要发生在真空泵供电装置上。
Results: See data pass measure and result by exchange ion pump's connect to ion pump PSU. Main question at ion pump PSU.
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