对二氧化硅反应离子刻蚀中反应室压力,刻蚀气体流量和射频功率等因素对刻蚀速率和刻蚀均匀性的影响进行了研究。
The influence of chamber pressure, gas flow rate and RF power on micro loading effect in reactive ion etch of silicon dioxide is researched.
通常,硅碳化合物通常由加热的沙子(通常由石英构成,或称二氧化硅)和石油或煤炭中提取的碳放在电气炉内反应而得到。
Normally, silicon carbide is produced by heating sand (which is made of quartz, or silicon dioxide) in an electric furnace with carbon made from oil or coal.
以二氧化硅为起始原料,与乙二醇、氢氧化钾反应,生成高活性的五配位硅钾化合物。
High reactive penta-coordinated organic silicon was prepared via the reaction of silica with ethylene glycol and potassium hydroxide.
以甲醛与尿素作为单体在正硅酸乙酯水解所得的氧化硅溶胶中进行聚合反应制得了有机—无机二氧化硅复合微球。
The composite silica microsphere was obtained through the polymerization of urea and formaldehyde occurred in the silica sol that prepared from the hydrolyzation of tetraethyl orthosilicate.
目的探讨游离二氧化硅累积接触与尘肺累积发病的剂量反应关系。
Objective to study dose response relationship between cumulative exposure to silica and cumulative incidence of pneumoconiosis.
硅酸钠浓度与反应温度之间的交互作用,对沉淀二氧化硅的BET比表面积影响显著。
BET specific surface area is influenced very much by the interaction of concentration of sodium silicate and reaction temperature.
因此随之而来的问题是:由于在形成热氧化物的时候,由于硅和氧的不完全反应,在硅和二氧化硅的界面会生成一氧化硅的气态不稳定物质。
So the problem is coming that SiO gaseous unstable matter is made in the interface of silicon and silicon dioxide due to silicon and oxygen incomplete reaction when making thermal oxide layer.
游离二氧化硅致肺组织纤维化机制十分复杂,涉及多种细胞及生物活性物质参与的炎症反应、免疫反应、异物反应、细胞毒作用等。
The mechanism of fibrosis caused by free silica particles involves a lot of cells and reactions including inflammatory reaction, immunological reaction, foreign body reaction and cell toxic action.
经不同工艺和过程制备二氧化硅气凝胶,初步摸索出制备温度、溶剂、催化剂、反应时间最佳参数。
The factors that influence silica aerogel preparations were investigated, and the optimum values were obtained for preparing temperature, solvent, catalyst and process duration.
以水玻璃和硫酸为原料,在超重力反应器中采用沉淀法合成了超细二氧化硅粉体。
Ultrafine silica powder was prepared in a rotating packed bed(RPB) reactor using water glass and sulfuric acid as raw materials.
制备了以超细二氧化硅为载体的氰乙基化可溶性蛋白质-钯催化剂,研究了它对三丁基锡氢化物和酰氯化合物偶联反应的催化活性。
Silica supported cyanoethylated soluble protein-Pd has been prepared and its catalytic activity in the cross-coupling reaction of tributyltin hydride and acid chlorides was studied.
通过控制反应条件,可以调控载银二氧化硅的银含量。
The effect of the reaction conditions on the silver content of SiO2/Ag composites was also studied.
以硅烷和氧化二氮作为反应气体,采用等离子体增强化学气相沉积(PECVD)技术,不使用掺杂,在单晶硅衬底上制备了用于平面光波导的二氧化硅薄膜。
Without doping, plasma enhanced chemical vapor deposition (PECVD) of silica films on si substrates with gas mixtures of SiH_4 and N_2O is considered.
以无定型二氧化硅为起始原料,与乙二醇、氢氧化钾反应,生成高反应活性的五配位硅钾化合物;
A highly reactive penta-coordinate organic silicon complex was prepared by the reaction of natural silica with ethylene glycol in the presence of potassium hydroxide.
以水玻璃和硫酸为原料,采用超重力反应沉淀法合成了超细二氧化硅粉体。
Ultrafine SiO_(2 ) powders were prepared by High Gravity Reactive Precipitation method from water glass solutions and sulphuric acid.
以水玻璃和硫酸为原料,采用超重力反应沉淀法合成了超细二氧化硅粉体。
Ultrafine SiO_(2 ) powders were prepared by High Gravity Reactive Precipitation method from water glass solutions and sulphuric acid.
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