最后阐述了高精度激光三角位移传感器的应用方向及发展趋势。
Some application examples and the development trends of high precision laser displacement sensor based on triangulation are given at the end of this paper.
文章概述了国内外双频激光干涉仪产品的现状,介绍了近年来双频激光干涉仪向高分辨率、高精度、高测速等几个方向的发展趋势。
The present state of the dual-frequency laser interferometer in the world is introduced in brief. The trends of development to high resolution, high accuracy, high measurement speed etc. are given.
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