采用高压探头示波器系统研究了射频辉光放电参数对自偏压的影响规律。
Influence of discharge parameters such as RF power and working pressure on the negative self-bias voltage of substrate was investigated by an oscilloscope with a high voltage probe.
根据高压换流阀中晶闸管的布置情况，设计了冲击电压测量用电阻型传感器探头的外形结构。
According to the arrangement of thyristors in HVDC converter valve, the configuration of a high voltage resistive probe used for impulse voltage measurement has been designed especially.
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