系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
由于人工照明光源的固有特性，其光输出中都存在着一定的频闪。
Due to the intrinsic characteristics of artificial lighting source, its light output in all exists certain stroboscopic.
对人体健康无危害，照明产品光源采用LED发光体，即开即亮无频闪；
No harm to human health. Using the LED as lighting source, the lamps have no strobe light, light on demand.
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