由溅射速率方程和反应粒子输运方程得出了靶面化合物的覆盖度。
The compound fraction of target surface was gotten from the rate equations of sputtering and the transport equations of reactive particles .
对宽带倍频光的光束匀滑及聚焦特性的研究，可为实现靶面均匀辐照提供参考。
The study on the beam smoothing and the focusing properties of the broadband harmonic field can provide valuable reference to the experiment.
基于红外发光二极管和光敏元件阵列的光电靶可以提高灵敏度，有效地增大靶面。
The photoelectric target based on LED and light sensitive element array could improve the sensitivity and enlarge the effective area.
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