由于涉及多种过程（包括入射离子与靶粒子的碰撞激发、电离、电荷转移等）及大的能量范围，我们采用多种方法联合处理这些过程。

The cross sections of excitation, ionization and charge transfer processes are obtained for energies between a few meV/u and MeV/u.

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各种金属或金属合成靶材被带电离子撞击，造成金属原子成为自由粒子沉积在上面的聚酯薄膜的表面。

Various metal or metal the material composing a target is collide with by electrified ion is brought about the metal atom becoming the free particle deposition surface in mylar above.

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在等离子体中，鞘层在控制带电粒子向极板(或靶材)方向运动方面起着至关重要的作用。

In plasma, the sheath plays a crucial role in controlling the movement of the charged particles towards the electrodes (or the target).

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