静电驱动微机电数模转换器的结构设计_智能器件_电力系统自动化网 关键词: MEMS; MEMDAC; 微执行器; 静电驱动; 悬臂梁 [gap=833]Keywords: MEMS; MEMDAC; microactuator; electrostatic drive; cantilever
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In this paper, we introduce the mass-spring model of electrostatic actuation, and also a general electrostatically structure(electrostatic-elastic systems).
本文介绍了静电驱动的质量弹簧模型，和更一般的静电驱动结构-静电弹性系统。
参考来源 - MEMS静电驱动系统中非局部问题研究·2,447,543篇论文数据，部分数据来源于NoteExpress
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
与传统的静电驱动悬臂梁执行器相比，新的结构能更精确地控制梁的挠度。
Compared with traditional electrostatic cantilever actuators, this device can control the deflection of the beam more accurately.
提出了一种基于静电驱动的新型谐波微电机，描述了该微电机的基本工作原理。
A novel harmonic micromotor actuated by electrostatic force was proposed, whose basic operating principles were also described.
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