介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
介绍静电复印机AC驱动器的维修经验并提出用固态继电器对原电路进行改进的方法。
Introduced the repair-experience of the AC driver of the electrostatic printer and proposed the method to improve the primary circuit with the solid-state armature.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
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