更大的问题是氧离子布植的速度天生就慢,因而成本高昂。
The greater problem is that oxygen implantation is inherently slow, which makes it costly.
第一种是在在矽(111)基板上成长氧化矽,并将镧系元素-铽,以离子布植的方式植入样品。
One of them is to implant terbium ion into silicon oxides thin film which is grown on Si(111) substrates.
集成电路内有主动元件区,配置复数个主动元件。P-N接合区以离子布植不同型态的掺质而完成。
The active element zone is IC is matched with several active elements and the P-N joint zone is finished by ionic layout different type of dopants.
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