传感器（10）还包括形成于隔膜层（16）下面 的空腔，并配置成提供加热元件的隔热。
The sensor (10) also includes a cavity formed under the diaphragm layer (16) and is configured to provide thermal isolation of the heating element.
隔热材料(102)围绕每个热电元件(104)的横向表面。
A thermally insulative material (102) surrounds the lateral surface of each thermoelectric element (104).
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