陶瓷薄膜是指用特殊工艺技术，将陶瓷材料制成厚度在几微米以下而仍能保持陶瓷优越性能的一类陶瓷材料。所制成的薄膜器件用于集成电路、半导体电路技术中。
利用脉冲激光溅射沉积pzt压电陶瓷薄膜。
This paper reports an investigation on PZT films by pulsed laser deposition.
从附着功的角度对金属与陶瓷薄膜间的结合力进行了初步的探讨。
Bonding forces between metals and ceramics films were studied from the viewpoint of adhesion work.
陶瓷薄膜的制备技术多种多样，如物理气相沉积、化学气相沉积、高温烧结和“溶胶-凝胶”法等。
There are many techniques for fabricating ceramic films such as PVD, CVD, high-temperature sintering and sol-gel method.
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