铁电电容器形成在衬底上并由一叠层体制成,该叠层体由依次叠置的下电极、电容器铁电膜和上电极构成。
A ferroelectric capacitor is formed above a substrate and made of a lamination of a lower electrode, a capacitor ferroelectric film and an upper electrode stacked in this order.
同均一相pzt薄膜材料相比,由致密层和多孔层交替排列形成的近周期PZT多层膜具有铁电、介电增强效应。
Compared with the uniform PZT thin films, the PZT multilayer with alternating dense-PZT and porous-PZT layers exhibits an enhancement both in ferroelectric and dielectric performances.
进一步分析发现,膜厚通过影响矫顽场强和最大极化强度进而影响铁电薄膜的电压非线性。
It is found that the film thickness dependence of the dielectric nonlinearity is determined by that of the coercive electric field and the maximal polarization.
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