这个输出入埠传送封包至一个特别的远端可撷取伺服器节点，此伺服器节点包含一个资讯的需求。
The I/ O port transmits packets to a specific one of the remotely accessible server nodes containing a request for information.
本发明是有关于一种用于半导体制造的系统，至少包含一制程工具，一缓冲器，一输入负载埠，一输出负载埠，与一轨径模组。
The invention relates to a system for semiconductor manufacture, comprising at least a processing tool, a buffer, an input load port, an output load port and a track diameter module.
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