超净工作台是一种局部净化设备,即利用空气净化技术使一定操作区内的空间达到相对的无尘、无菌状态。
Clean Bench is a partial purification equipment, namely the use of air purification technology to a certain region of space operations to achieve a relatively dust-free, sterile condition.
为了简化运输和尽可能降低被污染的风险,芯片制造商利用“前开式标准晶圆盒”即所谓的FOUP来搬运晶圆。每个无尘超净的晶圆盒中可放置25块硅晶圆。
To simplify transportation and minimize the risk of contamination, fabs make use of "front-opening unified pods, " or FOUPs. Each one holds 25 wafers in a sterile, clean environment.
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