木文对热灯丝cvd沉积金刚石膜的核化过程进行了分析,从理论上研究了负衬底偏压增强活性离子的流量。
In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
本文对热灯丝cvd沉积金刚石膜的核化过程进行了分析,从理论上研究了负衬底偏压增强活性离子的流量。
In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
分析了蒸镀热反射膜时电清洗玻璃的必要性,提出了在真空室体中设置栅极并加以负高压,采用氩气产生等离子场并用其轰击清洗玻璃表面的方法。
The necessity of electric purging in plating the heat reflective glass is analyzed. A method for purging the glass is given, which is using the plasma to bombard the superficies of the glass.
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