... resonator: 谐振器共振器,共振器,谐振器 resonator pressure transducer: 谐振式压力传感器 resonator sensor: 谐振式传感器 ...
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...谐振式压力传感器；绝缘体上硅；差分检测；阳极键合 [gap=875]Keywords: Micro-electromechanical system (MEMS); Resonant Pressure Sensor; SOI; Differentially detection; Anodic bonding ..
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科技词典字母V243页 ... vibrationalenergy振动能 vibrationalenergylevel振动能级 vibrationalentropy振动熵 ...
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提出了一种微机械谐振式压力传感器的新结构。
在谐振器动力学分析的基础上，系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点。
Based on dynamic analysis of resonator, speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
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