介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
在三轴转台的三个轴上同时施加恒定角速率，激励出加速度计动态误差项。
The constant angular rate was applied to three axis of turntable at the same time to actuate dynamic error term of accelerometer.
利用一只重力加速度计和自行研制的MEMS陀螺作为敏感部件，利用MSC1214对两路信号处理，输出旋转弹的滚动、俯仰和偏航的角速率。
The sensor consists of a MEMS gyroscope, an accelerometer and microprocessor (MSC1214) and can output the rolling, pitch and yaw angular rate of rolling airframe missile.
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