从等离子体波动方程和动力学方程出发，利用解析方法，讨论电感耦合rf放电等离子体的电流特性和衰减机制。
From plasma wave equations and plasma kinetic equation, we analytically discussed the characteristic of current in an inductive coupled RF plasma and their damping mechanism.
本文利用能量扰动法得到具边界记忆项波动方程初边值问题解的指数衰减性。
The exponent decay of solution of wave equation with boundary memory is obtained by the energy method.
应用推荐