在低于晶化温度条件下经氧化和还原处理后的薄膜表面晶化；
The surface crystallization started as the films were oxidized and reduced at the temperature lower than that at which crystallization occurred.
这些参数之间的变化关系符合直接碰撞导致非晶化模型，即每一个注入离子由于级联碰撞使表面局部的小区域非晶化。
The variation relations between these parameters are found to agree well with direct impact amorphisation model in which each projectileamorphises a logical region by cascade effect.
结果表明：降低沉淀温度和提高加料速度有利于获得较大比表面积的产品，但不利于产品颗粒晶型的完整化。
The experimental results show that the samples produced at lower precipitation temperature in a higher feeding speed have higher specific surface area but the crystallite shape appears imperfect.
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