提出了一种新颖的多孔硅表面钝化技术,即采用微波等离子体辅助的化学气相沉积(MPCVD)方法在多孔硅上沉积金刚石薄膜。
A novel passivation technology of porous silicon (PS) surface, i. e. , depositing diamond film on the PS surface by microwave plasma assisted chemical vapor deposition (MPCVD) method, was developed.
报道了金刚石薄膜的蓝区电致发光现象,总结了几种有关金刚石薄膜蓝区发光“A”带的发光机理。
The phenomenon of the blue range electroluminescence of the boron doped diamond thin films is reported, and the several light emission mechanisms on band A are summarized.
现已证明金刚石薄膜有压阻效应,这个性能打开了金刚石薄膜在压力传感器领域的应用。
It has been established that diamond films have piezoresistivity. This property enables diamond films to be used in the field of pressure sensor applications.
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