薄膜应力 [力] membrane stress ; thin film stress ; primary local membrane stress
薄膜应力千涉仪 film-stress interferometer
薄膜应力测试仪 Film Stress Measurement System ; MOS Scan ; Ultra Scan Stress Mapping System
低薄膜应力 low film stress
一次膜应力 primary membrane stress
初期综合膜应力 general primary membrane stress
初期局部膜应力 local primary membrane stress
一次总体薄膜应力 primary general membrane stress
角变形或其他几何缺陷的存在，造成膜应力和剪应力沿着器坒而变化。
The presence of angular distortion or other types of geometric defects causes the membrane stress and shear stress to vary along the wall.
通过膜应力和弯曲应力分布的特点，验证了板的屈曲过程的非线性特性。
The characteristic distributed for the membrane stress and crooked stress, has proved the bucking course of the panel is non-linear.
采用定点激光反射热循环方法，测量了硅基体上铜膜应力随温度的变化及等温松弛。
The stress variation with temperature and isothermal relaxation in copper films deposited onto silicon wafers are studied by fixed point laser reflection method.
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