曝光能量可调，曝光均匀性更好。
Exposing energy is adjustable, and the homogeneity of exposure is better.
列阵透镜由多个列阵元拼接而成，用以改善主透镜焦点附近能量分布的均匀性。
Lens array consists of many array units, which can improve energy distribution uniformity around the focus of main lens.
给出了能量、流强、扫描均匀性、扫描长度以及束斑形状等5个重要参数的测量方法及结果。
The methods and results for the 5 main parameters of energy, beam current, dose uniformity, beam scanning width, and beam profile were given.
应用推荐