...术 - 工程材料-科研基金网 关键词：纳米测量；激光干涉仪；纳米定位；误差补偿；压电马达 [gap=1521]Keywords：nano-measurement; laser interferometer; nano-positioning; error compensation; piezoelectric moto..
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Non-contact capacitance micrometer technology is a new important technique of micro/nanometer measurement, which has developed rapidly in recent years.
非接触式电容测微技术是微/纳米测量新技术中重要的一种,在近年来得到迅速发展。
参考来源 - 精密位移、振动测量的电容法研究With MEMS and nano-measurement technology developed, the demands on displacement accuracy and dynamic characteristics of precision platform were higher and higher.
随着微机械(MEMS)及纳米测量技术的发展,对精密工作台的位移精度和动态特性等提出越来越高的要求。
参考来源 - 精密工作台导轨的动态特性分析·2,447,543篇论文数据，部分数据来源于NoteExpress
原子力显微镜(afm)是进行纳米测量和操作的一种主要工具。
Atomic Force Microscopy (AFM) is a main instrument for nano-scale measurement and manipulation.
本课题针对这些要求，进行了光学多波长干涉法在纳米测量领域的应用研究。
On this problem, this study was to make the multi-wavelengths interferometry researches on nanometer scale measurement.
为了补偿激光外差干涉纳米测量中的非线性误差，提出了一种减小非线性误差的一次谐波方法。
To compensate of the nonlinearity error of heterodyne interferometers in nanometer measurement, a method for reducing the first harmonic nonlinearity is proposed.
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