采用等离子轰击扩渗钛、氮、碳技术处理制碱工业设备中的一些易损件，经现场实验，初见成效。
By field experiments, the technique of infiltration of titanium, nitrogen and carbon by plasma bombardment has proved effective in treatment of some wearing parts in soda manufacturing equipment.
我们同时对反应离子刻蚀工艺中的等离子体充电效应和离子轰击对氧化硅造成的损伤进行了讨论。
At the same time, the influence of plasma charging and ion bombardment on the quality of silicon oxide are analyzed.
研究了射频鞘层中离子轰击材料表面的能量通量与等离子体浓度之间的关系。
The relationship between the ion energy flux colliding on the material surface and the plasma density is investigated.
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