氦离子用等离子体浸没离子注入技术注入硅片中。
Helium ion was implanted by plasma immersion ion implantation technology.
提出等离子体浸没离子注入可以作为一种经济、有效的诱变育种方法。
Being an economical and available method plasma immersion ion implantation in mutagenic breeding is proposed.
球经高频低压等离子体浸没离子注入及氮化处理后，样品表面的硬度、耐磨性和耐腐蚀性显著提高，具有较好的均匀性。
The hardness, wear resistance and corrosion resistance of the ball were significantly increased after the treatment of HLPIII, and had better uniformity.
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