When the liquid is flowing through the micropumps and microvalves, there is definitely a possibility of cavitation erosion in the micro-electromechanical systems if apt hydrodynamic conditions develop, just like the cavitation erosion in the conventional scale hydraulic machinery.
同宏观机械系统一样,当流体通过微电子机械系统时,若满足空泡生成的流体力学条件,系统微型腔内部也会出现空蚀磨损现象。
参考来源 - 离子束增强沉积钛合金薄膜的空蚀磨损特性研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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