本发明涉及一种用于溅镀式镀膜机台的承载台，其包括：一第一载具及一中空的第二载具。
The invention relates to a bearing platform used for a sputtering type coating machine, which comprises a first bearing tool and a hollow second bearing tool.
空分装置中空压机的防喘振控制是压缩工段的关键，防喘振控制的好坏直接关系到空压机设备的安全，因此空压机控制组态十分重要。
Air compressor Surge proof control is key in compress section in ASU, Surge proof control affect the air compressor itself safety, therefor air compressor configuration is important.
所述第二中空部件界定有从所述第一空腔的顶端在所述第二方向上延伸的第三空腔。
The second hollow member defines a third hollow space extending in the second direction from the tip end of the first hollow space.
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