到目前为止，成功的应用于制备光波导的方法主要有： 1．离子注入法（ion implantation）：指将离子通过加速器加速后注入到衬底 材料中引起晶格缺陷从而改变材料的折射率，在晶体注入的近表面形成一个微米 量级的波导层...
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... 1、热扩散法（Thermal Diffusion Method） 2、离子注入法（Ion-injection Method） 气相成长法（epitaxial growth method） ...
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低能离子注入法 method of low energy ion injection
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离子注入法为提高金刚石和金刚石工具性能提供了一条有效的新途径。
The ion implantation method has provided a effective and new process for improving the performance of synthetic diamond and its tools.
本文采用微波等离子体cvd法制备定向生长的金刚石薄膜。用冷离子注入法对金刚石薄膜进行硼掺杂。
The diamond films were fabricated by microwave plasma CVD and the boron-doped was created by the cold ion implantation.
目前主要采用化学气相沉积法、离子束溅射法、激光等离子体沉积和激光烧蚀、离子镀、离子注入法等制备方法。
Its structure and character were reviewed, and the synthetic methods, including CVD, ion beam sputtering, laser ablation, ion plating and ion irradiation et al., were completely introduced.
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