(1) 蚀刻制程(ETCHING) (2) 离子植入(ION IMPLANTATION) (3) 化学机械研磨(CMP) ( ) 3. 在MOS制程中，源极(SOURCE)及泄极(DRAIN)是由哪种制程技术形成？
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且这三种结构皆简单制作而不需额外的光罩数和额外的离子植入。
And, those structures are simple to fabricate without any additional mask and implantation process.
本发明涉及解决在离子植入系统中的晶体切割误差数据，由此易于更准确的离子植入。
The present invention is directed to accounting for crystal cut error data in ion implantation systems, thereby facilitating more accurate ion implantation.
Abdolvand的目标是制作出一定范围的金属玻璃复合材料，包括银离子玻璃和银纳米粒子植入玻璃。
Abdolvand aims to fabricate a range of metal-glass composites, including silver-ion implanted and silver-nanoparticle implanted glasses.
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