...要精确地把握杂质的浓度及深度，此时即不宜由扩散之方法为之，故以”离子植入机”解离特定气体后调整离子束电流（Beam Current），谋划电流X时候获得所植入杂质的浓度并利用加快电压把握植入的深度。
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本发明提供一种排列有多个离子束引出孔的离子管，使得离子束电流密度变得均匀。
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
完成电路连接之后，接通偏置电压，在没有离子束电流的情况下进行电流测量，以验证系统能够正常工作。
After the connections are made, verify the system is working properly by turning the bias voltage on and taking a current measurement with no ion beam current.
本发明提供一种离子管及离子束的引出方法，离子管排列有多个离子束引出孔，使得离子束电流密度变得均匀。
The invention provides an ion pipe and ion beam extraction method, wherein the ion pipe is arranged with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
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