离子束混合制备表面合金相，是一种新的材料表面处理技术。
The method of producing surface alloy phases by ion beam mixing is a new technique used in the treatment of material surfaces.
本工作用卢瑟福背散射研究了离子束混合方法形成硅化钨的条件。
The conditions of forming tungsten silicide with As ion beam mixing have been studied by means of Rutherford backscattering.
观察到氧杂质对形成条件的影响，简单讨论了离子束混合形成硅化物的机理。
The effect of oxygen impurity on silicide formation has been observed. Finally, the mechanism on the formation of…
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