本文报导由碳氢气体的辉光放电分解而制备的氢化非晶碳膜的特性及其在金属表面防护上的应用。
This paper reports the properties of the hydrogenated amorphous carbon films prepared by glow discharge decomposition of hydrocarbon and the applications to metals surface protection.
合成过程中碳氢化合物和氢气的混合气体通入由热丝辐射加热的沉积室内，基体硅片置于热丝下方附近。
Deposition was carried out by passing gaseous mixture of hydrocarbon and hydrogen through a heated reaction chamber, in which a hot tungsten filament was held near the substrates.
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