结果表明，对切角及环境因素进行控制，可使石英晶体谐振器的频率–温度特性满足工程的需要。
The result shows that by controlling cut angle and environment conditions, frequency-temperature characteristic of quartz resonators can be adjusted to meet engineering needs.
第二，光学宽带监测系统与石英晶体传感器相结合，实现混合工艺控制技术，提高薄膜厚度的精度控制。
Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy.
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