本论文对真空蒸发法和直流溅射法沉积锌膜的工艺进行了研究，结合XRD、SEM、AFM等分析手段，以探索这两种方法在制备锌膜方面的一般规律。
The techniques of depositing zinc thin film on grass substrate by vacuum evaporation and direct-current sputtering were investigated with XRD, SEM and AFM in this paper.
由于沉积金刚石膜的时间长达几十个小时，而真空室真空度的稳定性对成膜质量的好坏有很大的影响，所以保持真空度的稳定将成为一个关键性的技术问题。
Because the time is for several ten hour to deposit the diamond film, the vacuum stability in chamber will affect the film quality greatly, so it is the key technology to keep the vacuum stability.
用热舟蒸发方法在不同的沉积速率下制备了LaF3单层膜，并对部分单层膜进行了真空退火。
LaF3 single-layer coatings were prepared by thermal boat evaporation at different deposition rates. Some of these films were annealed in vacuum.
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