相移干涉显微镜 Phase-shifting interferometric microscope
The paper has a general explain for the principle of phase-stepping microscopic interferometry, analyzes its technique details including the optical layout of interference microscope, phase-shifting interferometry, and phase unwrapping technique, and discusses various methods or algorithms in each part.
论文仔细分析了相移显微干涉测试技术的原理,分别从干涉显微镜的光学结构布局、相移干涉术和离面高度相位计算三部分,详细剖析等步长相移微视觉干涉的技术细节,并对各个部分中存在的方法或算法进行系统的分析。
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