为此，研究了接近式紫外光刻中部分相干光的传播过程，建立了相应的光刻理论模型，对光刻成像中的误差产生机理进行分析。
To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
分析了对合成孔径雷达相干干扰的难点以及星载、机载合成孔径雷达的特点，并提出了相应的相干干扰方法。
The difficulty of coherent jamming against SAR, the characteristics of air-borne SAR and space-borne SAR are analyzed. The corresponding coherent jamming methods are provided.
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