在电离真空规的线性测量上限部分,离子流随着压强上升而衰降。
Beyond the upper limit of the linear region of an ionization gauge, there is a falloff in the ion current with the increase of the measured pressure.
本文叙述的是以DL - 5电离真空规为传感器,用单片机作控制和测量的一种新型智能真空测量仪。
In this paper, we discuss a new type of intelligent vacuum measurement instrument controlled by single chip microcomputer with the sensor of the vacuum guage DL 5.
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