形成的一个电容性安排的一部分的多个梳齿可以制成该差动式传声器膜片的一部分。
Comb fingers forming a portion of a capacitive arrangement may be fabricated as part of the differential microphone diaphragm.
为了提高电容式触觉传感阵列的性能，本工作以SOI材料中异质结界面作为深槽腐蚀中腐蚀自停止界面，以提高硅膜片的表面平整度和厚度均匀性。
In order to improve the uniformity of the thin film of silicon, the interface of hetero-junction of SOI material was used as the interface of etch self-stopping.
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