关键词：微机电系统；横向敏感；刚度调节；高K介质；电容式加速度计 [gap=969]Keywords：MEMS；lateral sensing；stiffness tuning；high K dielectric；capacitive accelerometer
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对电容式加速度计，为测量其电容的变化，通常需要带直流偏置的交流电压信号来驱动。
For capacitive sensing, driving signal with DC bias voltage and ac voltage is usually necessary for the measurement of capacitance.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
本文首先分析了电容式闭环加速度计检测电路的原理，给出了低功耗的检测电路架构。
Firstly, a low power sensing circuit system is proposed by analysing closed-loop accelerometer sensing principle.
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