然后在氧等离子体中用电子束刻蚀法去除沟道区石墨烯形成晶体管的沟道。
They then defined the transistor channel using electron-beam lithography, removing graphene outside of channel regions with an oxygen plasma.
德克萨斯州农工大学的国家电子束研究中心主任Suresh Pillai把人们对辐照杀菌法的恐惧比作早期的对牛奶的巴士杀菌法的恐惧。
Suresh Pillai, director of the National Center for Electron Beam Research at Texas A&M University, likened fears of irradiation to early phobias about the pasteurization of milk.
用电子束刻蚀法在晶片上镀上纳米级铝层形成了电感器。
Inductors were defined by electron-beam lithography and formed by depositing micron-thick aluminium metal onto the wafers.
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