由于电子束在原子尺度不会绕射，所以它不会使得图案细节的边缘模糊。

An electron beam does not diffract at atomic scales, so it does not cause blurring of the edges of features.

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当使用这样的射束时，添加用于中和空间电荷的影响的电子或负离子对于获得成功往往是有决定性意义的。

When employing such beams, the addition of electrons or negative ions for neutralizing the effects of space charge is often crucial for achieving success.

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此外，电子束测量射野中半导体探测器的存在将干扰均匀射野剂量场的正常分布。

Furthermore, the presence of the detectors on the patient surface perturbs the distribution of the radiation field.

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