使用光强标定的发射光谱（AOES）测量了CHF3/C6H6混合气体的微波电子回旋共振（ECR）放电等离子体中基团的分布状态。
The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
利用工作于电子回旋频率的磁控管发射的微波功率在磁镜中产生了稳定的等离子体。
A stable plasma in the mirror is produced by using microwave with magnetron at electron cyclotron frequency.
应用推荐