由于使用的氢化物气体易燃、剧毒、具有腐蚀性,必须将氢化物钢瓶固定在气瓶柜(Gas Bottle Cabinet)中,气瓶柜强制排风,还配备有MDA CM4探头监测AsH3浓度。
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气瓶柜是处理半导体特殊气体的重要装置。
Gas cabinet is an important unit used to handle special gases for semiconductor pro - cess.
本实用新型提出的气瓶柜强制供气装置结构简单操作方便并且能够在很短时间内完成气瓶柜强制供气的操作。
The utility model is characterized by simple structure and easy operation, which can complete forced air supply for gas cabinets in a short time.
这些计量分配器是一种储藏柜,能储存4到120瓶酒之间。柜子一旦打开,里面就会充满诸如氮或氩之类的惰性气体,从而氧气无法进入。
These are cabinets which hold anywhere between four and 120 bottles that, once opened, are topped up with inert gases like nitrogen or argon to keep the oxygen out.
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