在集成电路领域，特征尺寸是指半导体器件中的最小尺寸。在CMOS工艺中，特征尺寸典型代表为“栅”的宽度，也即MOS器件的沟道长度。一般来说，特征尺寸越小，芯片的集成度越高，性能越好，功耗越低。
特征尺寸 Feature Size ; Critical Dimension ; characteristic dimension ; geometrical dimensions
液滴特征尺寸 [热] drop characteristic dimension
爆源特征尺寸 explosion resource characteristic size
的特征尺寸 Critical Dimension
光刻是实现特征尺寸 Critical dimension
人体特征尺寸 human body's characteristic dimension
特征尺寸测量 Inspection
物种特征尺寸 species characteristic size
修改特征尺寸 Modify
特征空间尺寸 characteristic space scale
With the development of micro-manufacture technique and computer technology, the feature size of binary optical elements becomes smaller and smaller. If binary optical elements are designed by the scalar diffraction theory, it will lead very monstrous error.
随着微细加工工艺和计算机技术的发展,二元光学元件的特征尺寸进一步减小,利用标量衍射理论对其进行设计时将会产生较大误差,必须采用矢量衍射理论进行优化设计。
参考来源 - 二元光学元件矢量衍射设计与并行直写制作After reconstructing a standard female mannequin, so long as users input self characteristic size parameters in this system, such as chest girth, waist girth, hip girth and so on, a individualized human body model is viewed.
在标准三维人体模型的基础上,用户只要输入自己的特征尺寸(胸围、腰围、臀围等)就可以得到自身模型。
参考来源 - 三维虚拟试衣系统中参数化人体建模技术的研究In recent years the scale of the integrate circuit become larger and larger, the feature size of wafer has become much smaller, to guarantee the quality in following process, the demand to surface precision of wafer is very serious.
近年来集成电路的规模越来越大,其所用芯片的特征尺寸越来越小,为保证后续加工的质量,对表面精度的要求是非常严格的。
参考来源 - 流体二维振动超光滑表面加工振动场分析与实验研究·2,447,543篇论文数据，部分数据来源于NoteExpress
MEMS器件的特征尺寸范围为几微米到几毫米。
The characteristic size of MEMS components is from micron to millimeter.
现代的电子和光子器件都是小特征尺寸的固体结构。
Modern electronic and photonic devices are solid structures of small feature sizes.
随着特征尺寸的不断缩小，微细加工技术的水平逐渐提高。
Along with the characteristic size continuously reducing the micron processing technology's level gradually increase.
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