通过金属有机物化学气相沉积方法在碳纳米管模板上生长氮化镓纳米线束。
Template growth of gallium nitride nanowires was demonstrated by metal organic chemical vapor deposition (MOCVD) with carbon nanotubes as templates in this paper.
介绍了独联体国家难熔金属氟化物化学气相沉积的工艺、设备及其产品的开发情况和研究进展。
This paper reviews fluorides CVD methods for refractory metals in CIS countries, including modern development of the equipment and products.
以乙酰丙酮铱为前驱体，采用金属有机化合物化学气相沉积(MOCVD)技术在钼基体上制备了铱薄膜。
Ir films were prepared by metal-organic chemical vapor deposition (MOCVD) method using iridium tri-acetylacetonate precursors on molybdenum substrates.
应用推荐