放电过程中，灯管主要受冲击波和热负载两方面的作用。
Shock wave and thermal load are the two main effects on the envelope during the discharge.
另一种是以冰水温度随热负载重置，可以精确地符合负载端需求。
Another is based on ice water temperature with thermal load reset, can accurately meet both the load demand.
这是采用独特的多光束技术实现的，图2显示了其工作原理，降低了功率密度，减小了热负载，缩小了刻线宽度。
This is achieved by using a unique multi beam technology, demonstrated in figure 2, which reduces the power density, minimizes the thermal load, and reduces the kerf width in the wafer.
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