素材氧化严重，如氧化斑，热处理后氧化膜。
Material oxidation, such as oxidation spot, serious after heat treatment of oxide film.
低温下进行水热处理，羟基磷灰石晶体在氧化膜的表面沉积。
Hydroxyapatite crystals were precipitated on film surfaces at low temperature hydrothermal treatment.
报告了相应的成膜技术、膜厚控制技术、热处理技术和热氧化现象。
The experiment results including optical waveguide, film thickness control, heat treatment and thermal oxidization are reported.
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