...con的缩写,一般情况下低温多晶硅的制程温度应低于摄氏600度,尤其对LTPS区别于a-Si制造的制造程序“激光退火”(laser anneal)要求更是如此。
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We also use end-coupling method to measure the intensity of light propagation in waveguide. After performing both thermal annealing and laser annealing on the implanted waveguide, the characteristics of lithium niobate waveguide suffering annealing treatment were analyzed and discussed.
我们还利用端面耦合的方法研究了波导的光强传播特性,并分别采用热退火和激光退火的方法处理所形成的光波导,系统的研究了两种离子共同注入铌酸锂所形成的双层光波导的退火特性。
参考来源 - 离子注入铌酸锂波导的退火研究The thres-hold is improved to 1.4,1.9 or 2.7 times that before annealing for fundamental,second or third harmonic,respectively. Thus laser annealing is an effective approach to enhance laser-induced damage resistance of DKDP crystal.
实验表明,激光退火对于DKDP晶体的损伤阈值有显著的提升作用,基频、倍频、三倍频的提升效果分别达到1.4,1.9,2.7倍,是改善DKDP晶体抗光伤能力的有效途径。
参考来源 - 不同波长三倍频DKDP晶体的激光损伤·2,447,543篇论文数据,部分数据来源于NoteExpress
电子吸收像表明:我们的CW CO_2激光退火条件下,其效果并不很均匀。
Electron absorption image shows that the effect of CW-CO2 laser annealing is not very uniform in our case.
本文用激光探针测量了砷离子注入硅在CW CO_2激光退火过程中的实时分辨反射率。
The time-resolved optical reflectivity of as ion-implanted silicon during CW CO_2 laser annealing has been measured by using laser probes.
这些应用大致涵盖激光掺杂、激光退火、激光沉积薄膜、激光引发固相反应和激光光刻等几方面。
They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph.
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